Nanoscale HZO-SiO₂ Engineering Stabilizes Resonators Across Wide Temperature Swings
A new CMOS-compatible resonator platform, detailed in *Nature Communications*, has been developed through nanoscale HZO-SiO₂ engineering. This innovation achieves stable resonator performance across wide temperature fluctuations, potentially leading to tougher coatings and improved device reliability in various applications.
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