China's DUV Lithography System Stockpiling Prompts Calls for Stricter U.S. Export Controls

A new report indicates that Chinese chipmakers had acquired an estimated 343 deep ultraviolet (DUV) lithography systems by early 2026, including approximately 270 ASML Twinscan NXT:1980i units. This significant stockpiling, driven by the inability to obtain advanced extreme ultraviolet (EUV) equipment, has led former U.S. export control officials to advocate for comprehensive restrictions on DUV exports to China, including equipment, components, and after-sales services, to close existing policy gaps.