Nikon Begins Accepting Orders for World's First Submicron-Resolution FPD Lithography System

Nikon Corporation has started accepting orders for its FX-6ASLH FPD lithography system, which achieves 0.85 µm resolution. This makes it the world's first FPD lithography system to deliver submicron resolution, optimized for the production of high-definition OLED and LCD panels used in advanced smart devices.