Nikon Begins Orders for World's First Submicron-Resolution FPD Lithography System

Nikon Corporation has started accepting orders for its FX-6ASLH FPD lithography system, which achieves a resolution of 0.85 µm (L/S), making it the world's first FPD lithography system to deliver submicron resolution. This system is optimized for producing high-definition OLED and LCD panels used in advanced smart devices, representing a significant advancement in display manufacturing technology.